Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372885 | Substrate processing apparatus and method of fabricating semiconductor device using the same | Seok Heo, Cha-Won Koh, Hyun-Woo Kim, Kyung Won Kang, Dong Wook Kim +3 more | 2025-07-29 |
| 11927890 | Substrate processing apparatus and method of fabricating semiconductor device using the same | Seok Heo, Cha-Won Koh, Hyun-Woo Kim, Kyung Won Kang, Dong Wook Kim +3 more | 2024-03-12 |
| 10635006 | Chuck-driving device and substrate-processing apparatus | Jung-Jae Kim, Sang Hyun Park, Ono Kazuya, Si Woong WOO | 2020-04-28 |
| 10515844 | Substrate supporting and transferring apparatus, method of supporting and transferring substrate, and manufacturing method of display apparatus using the same | Sang Hyun Park | 2019-12-24 |
| 9897772 | Fixing module for fixing an optical system to an optical apparatus and an optical apparatus including the same | Hi-Kuk Lee, Sang Don Jang | 2018-02-20 |
| 9163709 | Gantry apparatus | Oui Serg Kim, Sang Hyun Park, Roger Francisus Mattheus M Hamelinck | 2015-10-20 |
| 8994922 | Lens barrel support device and maskless exposure apparatus having the same | Sang Hyun Park, Sang Don Jang, Oui Serg Kim, Dong Seok Baek | 2015-03-31 |
| 8608400 | Position arrangement device and joint module thereof | In Bae Jang, Sang Hyun Park, Ho Seok Choi | 2013-12-17 |
| 8610891 | Gantry apparatus | Oui Serg Kim, Sang Hyun Park, Roger Francisus Mattheus M Hamelinck | 2013-12-17 |
| 8593616 | Actuator, stage device, and exposure apparatus | Sang Hyun Park, Sang Don Jang, Oui Serg Kim, Ja Choon Koo, Yong Seok Ihn +2 more | 2013-11-26 |