Issued Patents All Time
Showing 25 most recent of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12372885 | Substrate processing apparatus and method of fabricating semiconductor device using the same | Seok Heo, Sang Joon Hong, Hyun-Woo Kim, Kyung Won Kang, Dong Wook Kim +3 more | 2025-07-29 |
| 11927890 | Substrate processing apparatus and method of fabricating semiconductor device using the same | Seok Heo, Sang Joon Hong, Hyun-Woo Kim, Kyung Won Kang, Dong Wook Kim +3 more | 2024-03-12 |
| 10797056 | Semiconductor device and method of manufacturing the same | Jin A Kim, Yong Kwan Kim, Se-Keun Park, Joo Young Lee, Yeong-Cheol Lee | 2020-10-06 |
| 10688437 | Filter structure for chemical solution used in manufacturing integrated circuit and apparatus for supplying chemical solution including filter structure for chemical solution | Oleg Feygenson, Jung-Hyeon Kim, Hyun-Woo Kim, Eun-Sung Kim | 2020-06-23 |
| 10586798 | Semiconductor device and method of manufacturing the same | Jin A Kim, Yong Kwan Kim, Se-Keun Park, Joo Young Lee, Yeong-Cheol Lee | 2020-03-10 |
| 10438810 | Method of forming photoresist pattern and method of fabricating semiconductor device using the same | Cheol-Hong Park, Hyun-Woo Kim, Jin-Kyu Han | 2019-10-08 |
| 10345701 | Photoresist polymers, photoresist compositions, methods of forming patterns and methods of manufacturing semiconductor devices | Jin Kyu Park, Hyun-Woo Kim, Jin-Kyu Han | 2019-07-09 |
| 9842852 | Methods of forming patterns using photoresist polymers and methods of manufacturing semiconductor devices | Jin Kyu Park, Hyun-Woo Kim, Jin-Kyu Han | 2017-12-12 |
| 9772555 | Methods of forming patterns using photoresists | Cheol-Hong Park, Sang-Yoon Woo, Hyun-Woo Kim, Sang Min Park | 2017-09-26 |
| 9520289 | Methods of forming a pattern of a semiconductor device | Jin-Jun Park, Hyun-Woo Kim | 2016-12-13 |
| 9482953 | Lithography apparatus having effective thermal electron enhancement unit and method of forming pattern using the same | Jeon Il Lee, Su Min Kim, Hyun-Woo Kim, Jin-Jun Park | 2016-11-01 |
| 9412604 | Methods of manufacturing semiconductor device | Hyun-Woo Kim, Jong Soo Kim, Jin Kyu Park, Hyung-Rae Lee | 2016-08-09 |
| 9147687 | Methods of fabricating semiconductor devices | Hyun-Woo Kim, Jeon Il Lee, Hyo-Sung Lee | 2015-09-29 |
| 8999840 | Method of forming fine patterns of semiconductor device | — | 2015-04-07 |
| 8557131 | Methods of forming fine patterns and methods of fabricating semiconductor devices | Min-Joon Park, Chang-Min Park | 2013-10-15 |
| 8278221 | Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same | Han-ku Cho, Jeong-Lim Nam, Gi-Sung Yeo, Joon-soo Park, Ji-Young Lee | 2012-10-02 |
| 8003543 | Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same | Han-ku Cho, Jeong-Lim Nam, Gi-Sung Yeo, Joon-soo Park, Ji-Young Lee | 2011-08-23 |
| 7998874 | Method for forming hard mask patterns having a fine pitch and method for forming a semiconductor device using the same | Hak-Sun Lee, Myeong-Cheol Kim, Kyung-yub Jeon, Ji-Young Lee | 2011-08-16 |
| 7892982 | Method for forming fine patterns of a semiconductor device using a double patterning process | Doo-Youl Lee, Pan-Suk Kwak, Sung-Gon Jung, Jung-hyeon Lee, Suk-Joo Lee +1 more | 2011-02-22 |
| 7862988 | Method for forming patterns of semiconductor device | Yool Kang, Sang-Gyun Woo, Seok-Hwan Oh, Gi-Sung Yeo, Ji-Young Lee | 2011-01-04 |
| 7842451 | Method of forming pattern | Sang-Gyun Woo, Gi-Sung Yeo, Myoung-Ho Jung | 2010-11-30 |
| 7787301 | Flash memory device using double patterning technology and method of manufacturing the same | Doo-Youl Lee, Han-ku Cho, Suk-Joo Lee, Gi-Sung Yeo, Pan-Suk Kwak | 2010-08-31 |
| 7732341 | Method of forming a hard mask and method of forming a fine pattern of semiconductor device using the same | Han-ku Cho, Jeong-Lim Nam, Gi-Sung Yeo, Joon-soo Park, Ji-Young Lee | 2010-06-08 |
| 7723702 | E-beam lithography system for synchronously irradiating a plurality of photomasks and method of fabricating photomasks using the same | Je-bum Yoon, Myoung-Ho Jung, Gi-Sung Yeo, Sang Jin Kim | 2010-05-25 |
| 7687369 | Method of forming fine metal patterns for a semiconductor device using a damascene process | Jeong-Lim Nam, Gi-Sung Yeo, Sang Jin Kim, Sung-Gon Jung | 2010-03-30 |