Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7723702 | E-beam lithography system for synchronously irradiating a plurality of photomasks and method of fabricating photomasks using the same | Cha-Won Koh, Myoung-Ho Jung, Gi-Sung Yeo, Sang Jin Kim | 2010-05-25 |