Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7842451 | Method of forming pattern | Cha-Won Koh, Sang-Gyun Woo, Gi-Sung Yeo | 2010-11-30 |
| 7723702 | E-beam lithography system for synchronously irradiating a plurality of photomasks and method of fabricating photomasks using the same | Je-bum Yoon, Cha-Won Koh, Gi-Sung Yeo, Sang Jin Kim | 2010-05-25 |
| 7575855 | Method of forming pattern | Cha-Won Koh, Sang-Gyun Woo, Gi-Sung Yeo | 2009-08-18 |
| 7335455 | Method of forming an underlayer of a bi-layer resist film and method of fabricating a semiconductor device using the same | Hyun-Woo Kim, Jin Hong, Sang-Gyun Woo | 2008-02-26 |