Issued Patents All Time
Showing 1–25 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8865375 | Halftone phase shift blank photomasks and halftone phase shift photomasks | Il-Yong Jang, Hoon Kim, Hye-Kyoung Lee, Dong-Seok Nam | 2014-10-21 |
| 8435705 | Methods of correcting optical parameters in photomasks | Haek-seung Han, Dong-Seok Nam | 2013-05-07 |
| 8329363 | Methods of fabricating halftone phase shift blank photomasks and halftone phase shift photomasks | Il-Yong Jang, Hoon Kim, Hye-Kyoung Lee, Dong-Seok Nam | 2012-12-11 |
| 8241837 | Mask pattern for semiconductor device fabrication, method of forming the same, and method of fabricating finely patterned semiconductor device | Jung-hwan Hah, Jin-Gi Hong, Hyun-Woo Kim, Hata Mitsuhiro, Kolake Mayya Subramanya | 2012-08-14 |
| 8242018 | Semiconductor device having fine contacts and method of fabricating the same | Ji-Young Lee, Hyun Jae Kang | 2012-08-14 |
| 8062981 | Method of forming pattern using fine pitch hard mask | Ji-Young Lee, Joon-soo Park | 2011-11-22 |
| 8013374 | Semiconductor memory devices including offset bit lines | Doo-Hoon Goo, Han-ku Cho, Joo-tae Moon, Gi-Sung Yeo, Kyoung-Yun Baek | 2011-09-06 |
| 8013375 | Semiconductor memory devices including diagonal bit lines | Duo-Hoon Goo, Han-ku Cho, Joo-Tac Moon, Gi-Sung Yeo, Kyoung-Yun Baek | 2011-09-06 |
| 8007963 | Photomask | Myoung-Soo Lee, Young-Su Sung | 2011-08-30 |
| 7985529 | Mask patterns including gel layers for semiconductor device fabrication | Mitsuhiro Hata, Hyun-Woo Kim, Jung-hwan Hah | 2011-07-26 |
| 7900170 | System and method correcting optical proximity effect using pattern configuration dependent OPC models | Sung-soo Suh, Young-Seog Kang, Han-ku Cho | 2011-03-01 |
| 7862988 | Method for forming patterns of semiconductor device | Cha-Won Koh, Yool Kang, Seok-Hwan Oh, Gi-Sung Yeo, Ji-Young Lee | 2011-01-04 |
| 7855408 | Semiconductor device having fine contacts | Ji-Young Lee, Hyun Jae Kang | 2010-12-21 |
| 7855038 | Mask patterns for semiconductor device fabrication and related methods and structures | Jung-hwan Hah, Hyun-Woo Kim, Mitsuhiro Hata | 2010-12-21 |
| 7851125 | Mask pattern for semiconductor device fabrication, method of forming the same, and method of fabricating finely patterned semiconductor device | Jung-hwan Hah, Jin-Gi Hong, Hyun-Woo Kim, Hata Mitsuhiro, Kolake Mayya Subramanya | 2010-12-14 |
| 7842601 | Method of forming small pitch pattern using double spacers | Ji-Young Lee, Joon-soo Park | 2010-11-30 |
| 7842451 | Method of forming pattern | Cha-Won Koh, Gi-Sung Yeo, Myoung-Ho Jung | 2010-11-30 |
| 7807318 | Reflective photomask and method of fabricating the same | Jin Hong Park, Han-ku Cho, Seong-sue Kim, Suk-Joo Lee | 2010-10-05 |
| 7799490 | Optical masks and methods for measuring aberration of a beam | Chan Hwang, Suk-Joo Lee, Han-ku Cho | 2010-09-21 |
| 7678650 | Nonvolatile memory device and method of manufacturing the same | Cha-Won Koh, Byung-Hong Chung, Jeong-Lim Nam, Seok-Hwan Oh, Jai-Hyuk Song +2 more | 2010-03-16 |
| 7670725 | Optical masks and methods for measuring aberration of a beam | Chan Hwang, Suk-Joo Lee, Han-ku Cho | 2010-03-02 |
| 7642042 | Polymer, top coating layer, top coating composition and immersion lithography process using the same | Mitsuhiro Hata, Sang-jun Choi, Man-Hyoung Ryoo | 2010-01-05 |
| 7604907 | Multi-exposure semiconductor fabrication mask sets and methods of fabricating such multi-exposure mask sets | Doo-Youl Lee, Seok-Hwan Oh, Gi-Sung Yeo, Sook Lee, Joo-On Park +1 more | 2009-10-20 |
| 7604911 | Mask pattern for semiconductor device fabrication, method of forming the same, method for preparing coating, composition for fine pattern formation, and method of fabricating semiconductor device | Mitsuhiro Hata, Jung-hwan Hah, Hyun-Woo Kim | 2009-10-20 |
| 7582899 | Semiconductor device having overlay measurement mark and method of fabricating the same | Cha-Won Koh, Seok-Hwan Oh, Gi-Sung Yeo, Hyun Jae Kang, Jang-Ho Shin | 2009-09-01 |