Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9632437 | Lithography apparatus, method for lithography and stage system | Jin Hong Park, Jeong-Ho Yeo, Chang-Min Park | 2017-04-25 |
| 9575421 | Apparatus for protecting extreme ultra violet mask and extreme ultra violet exposure apparatus including the same | Myung-soo Hwang, Chang-Min Park | 2017-02-21 |
| 9057954 | Apparatus for creating an extreme ultraviolet light, an exposing apparatus including the same, and electronic devices manufactured using the exposing apparatus | Chang-Min Park, Jeong-Ho Yeo | 2015-06-16 |
| 8625110 | Methods of inspecting structures | Seouk-Hoon Woo, Jeong-Ho Yeo, Byeong-Ok Cho, Chang-Min Park, Won-sun Kim | 2014-01-07 |
| 8599360 | Reflective reticle chuck, reflective illumination system including the same, method of controlling flatness of reflective reticle using the chuck, and method of manufacturing semiconductor device using the chuck | Jin-Seok Heo, Chang-Min Park, Jeong-Ho Yeo, In-Sung Kim | 2013-12-03 |
| 8287792 | Methods of forming fine patterns using a nanoimprint lithography | Jeong Hoon Lee, Jeong-Ho Yeo, In-Sung Kim, Doo-Hoon Goo, Jin Hong Park +1 more | 2012-10-16 |
| 7604907 | Multi-exposure semiconductor fabrication mask sets and methods of fabricating such multi-exposure mask sets | Doo-Youl Lee, Seok-Hwan Oh, Gi-Sung Yeo, Sang-Gyun Woo, Sook Lee +1 more | 2009-10-20 |
| 6045967 | Method and device using ArF photoresist | Jae Chang Jung, Chi Hyeong Roh | 2000-04-04 |