Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12189295 | Spin coater and semiconductor fabrication method using the same | Kwangsub Yoon | 2025-01-07 |
| 11537047 | Spin coater and semiconductor fabrication method for reducing regeneration of photoresist | Kwangsub Yoon | 2022-12-27 |
| 9996009 | Extreme ultraviolet (EUV) exposure system and method of manufacturing semiconductor device using the same | Chang-Min Park, Ji Sun Lee | 2018-06-12 |
| 9874809 | Pellicle for a reflective mask and reflective mask assembly including the same | Chang-Min Park, Jin Hong Park | 2018-01-23 |
| 9575421 | Apparatus for protecting extreme ultra violet mask and extreme ultra violet exposure apparatus including the same | Joo-On Park, Chang-Min Park | 2017-02-21 |