Issued Patents All Time
Showing 1–24 of 24 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9867267 | Extreme ultraviolet light source device | Seung-Koo Lee, Jin Hong Park | 2018-01-09 |
| 9791788 | Method of manufacturing a semiconductor device | Jin-Seok Heo | 2017-10-17 |
| 9658522 | Reflective extreme ultraviolet mask | Sang Hyun Kim, Dong-Wan Kim, Chang-Min Park, Dong Gun Lee | 2017-05-23 |
| 9645484 | Reflective masks for use in extreme ultraviolet lithography apparatus and methods of manufacturing the same | Seong-sue Kim, Hwan-Seok Seo, Tae Geun Kim | 2017-05-09 |
| 9116438 | Method of correcting flare and method of preparing extreme ultra violet mask | Young Mi Lee, Ji-Soong Park, Byoung-Sup Ahn, Jae-pil Shin | 2015-08-25 |
| 8599360 | Reflective reticle chuck, reflective illumination system including the same, method of controlling flatness of reflective reticle using the chuck, and method of manufacturing semiconductor device using the chuck | Jin-Seok Heo, Chang-Min Park, Jeong-Ho Yeo, Joo-On Park | 2013-12-03 |
| 8287792 | Methods of forming fine patterns using a nanoimprint lithography | Jeong Hoon Lee, Jeong-Ho Yeo, Joo-On Park, Doo-Hoon Goo, Jin Hong Park +1 more | 2012-10-16 |
| 8158958 | Flare evaluation methods | Jooon Park, Doo-Hoo Goo, Jeong Hoon Lee, Chang-Min Park | 2012-04-17 |
| 8119309 | Reflective photomask and method of fabricating, reflective illumination system and method of process using the same | Dong Gun Lee, Seong-sue Kim, Hwan-Seok Seo | 2012-02-21 |
| 8006202 | Systems and methods for UV lithography | Gian Francesco Lorusso, Byeong-Soo Kim, Anne-Marie Goethals, Rik Jonckheere, Jan Hermans | 2011-08-23 |
| 7635547 | Stencil mask having main and auxiliary strut and method of forming the same | Ho-Chul Kim | 2009-12-22 |
| 7501327 | Fabricating method of semiconductor optical device for flip-chip bonding | Young Hyun Kim, Yu-Dong Bae, Young-Churl Bang | 2009-03-10 |
| 7475383 | Method of fabricating photo mask | Sung-soo Suh, Young-Seog Kang | 2009-01-06 |
| 7473497 | Phase shifting mask for manufacturing semiconductor device and method of fabricating the same | Jung-hyeon Lee, Sung-Gon Jung | 2009-01-06 |
| 7384711 | Stencil mask having main and auxiliary strut and method of forming the same | Ho-Chul Kim | 2008-06-10 |
| 7361433 | Photomask for forming photoresist patterns repeating in two dimensions and method of fabricating the same | Chan-Soo Hwang, Young-Seog Kang | 2008-04-22 |
| 7300746 | Photomask for forming small contact hole array and methods of fabricating and using the same | — | 2007-11-27 |
| 7288422 | Photonic integrated device using reverse-mesa structure and method for fabricating the same | Byeong-Hoon Park, Yu-Dong Bae, Byung-Kwon Kang, Young Hyun Kim, Sang Moon Lee | 2007-10-30 |
| 7127134 | Semiconductor optical device | Byung-Kwon Kang, Yu-Dong Bae, Byeong-Hoon Park, Sang Moon Lee, Young Hyun Kim | 2006-10-24 |
| 7022438 | Photomask for forming small contact hole array and methods of fabricating and using the same | — | 2006-04-04 |
| 6893779 | Phase shifting mask for manufacturing semiconductor device and method of fabricating the same | Jung-hyeon Lee, Sung-Gon Jung | 2005-05-17 |
| 6716746 | Semiconductor device having self-aligned contact and method of fabricating the same | Joon-soo Park, Jung-hyeon Lee, Hyun Jae Kang | 2004-04-06 |
| 6492701 | Semiconductor device having anti-reflective cap and spacer, method of manufacturing the same, and method of manufacturing photoresist pattern using the same | Jung-hyeon Lee, Han-ku Cho | 2002-12-10 |
| 5547883 | Method for fabricating thin film transistor | — | 1996-08-20 |