Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8229205 | Pattern matching method in manufacturing semiconductor memory devices | Chan-Kyeong Hyon, Sang Ho Lee, Hyun Jong Lee | 2012-07-24 |
| 7900170 | System and method correcting optical proximity effect using pattern configuration dependent OPC models | Sung-soo Suh, Han-ku Cho, Sang-Gyun Woo | 2011-03-01 |
| 7475383 | Method of fabricating photo mask | Sung-soo Suh, In-Sung Kim | 2009-01-06 |
| 7361433 | Photomask for forming photoresist patterns repeating in two dimensions and method of fabricating the same | Chan-Soo Hwang, In-Sung Kim | 2008-04-22 |
| 7139064 | Optical system for providing a hexapole illumination and method of forming a photoresist pattern on a substrate using the same | Dong-Seok Nam, Chan-Soo Hwang | 2006-11-21 |
| 6911286 | Method of designing phase grating pattern providing modified illumination optimum for producing a target pattern and method of manufacturing a photo mask system comprising the phase grating pattern | Jong-Rak Park | 2005-06-28 |