Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10444619 | Mask blank and phase shift mask using same | Hye-Kyoung Lee, Il-Yong Jang, Byung-Gook Kim | 2019-10-15 |
| 9645484 | Reflective masks for use in extreme ultraviolet lithography apparatus and methods of manufacturing the same | Seong-sue Kim, In-Sung Kim, Tae Geun Kim | 2017-05-09 |
| 9454074 | Reflective photomask blanks and reflective photomasks | Su-Young Lee | 2016-09-27 |
| 9025624 | Beam generator | Dong Gun Lee, Seong-sue Kim | 2015-05-05 |
| 8637840 | EUV projection lens and optic system having the same | Dong Gun Lee, Seong-sue Kim | 2014-01-28 |
| 8119309 | Reflective photomask and method of fabricating, reflective illumination system and method of process using the same | Dong Gun Lee, Seong-sue Kim, In-Sung Kim | 2012-02-21 |
| 6190994 | Method for forming a tungsten upper electrode of a capacitor | — | 2001-02-20 |
| 6184113 | Method of manufacturing a gate electrode in a semiconductor device | Sang-Hyeob Lee | 2001-02-06 |
| 5264973 | Door opening system for an electronic household apparatus | Kwon Hong | 1993-11-23 |