Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11353413 | Mask inspection apparatuses and methods, and methods of fabricating masks including mask inspection methods | Hyon Seok Song, In-Yong Kang | 2022-06-07 |
| 10955369 | Mask inspection apparatuses and methods, and methods of fabricating masks including mask inspection methods | Hyon Seok Song, In-Yong Kang | 2021-03-23 |
| 10474034 | Phase shift mask | Hyung-Ho Ko, Jin Sang Yoon | 2019-11-12 |
| 10444619 | Mask blank and phase shift mask using same | Hye-Kyoung Lee, Hwan-Seok Seo, Byung-Gook Kim | 2019-10-15 |
| 9989860 | Method of generating a pattern on a photomask using a plurality of beams and pattern generator for performing the same | Sang-Hee Lee, Hyun-Seok Uhm | 2018-06-05 |
| 9989857 | Photomask and method of forming the same and methods of manufacturing electronic device and display device using the photomask | Hyung-Ho Ko, Jin Sang Yoon | 2018-06-05 |
| 8865375 | Halftone phase shift blank photomasks and halftone phase shift photomasks | Hoon Kim, Hye-Kyoung Lee, Sang-Gyun Woo, Dong-Seok Nam | 2014-10-21 |
| 8592105 | Photomasks and methods of fabricating the same | Byung-Gook Kim | 2013-11-26 |
| 8329363 | Methods of fabricating halftone phase shift blank photomasks and halftone phase shift photomasks | Hoon Kim, Hye-Kyoung Lee, Sang-Gyun Woo, Dong-Seok Nam | 2012-12-11 |
| 7560198 | Photo-mask having exposure blocking region and methods of designing and fabricating the same | Seong-woon Choi, Seong-yong Moon, Jeong Yun Lee, Sung-Hoon Jang | 2009-07-14 |
| 7527901 | Method of repairing phase shift mask | Jeong Yun Lee, Seong-woon Choi, Won-Suk Ahn, Sung-Jae Han | 2009-05-05 |
| 7371484 | Photomask blank and method of fabricating a photomask from the same | Jeong Yun Lee, Ka-soon Yim, Jae Hee HWANG | 2008-05-13 |