Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9229327 | Electron beam exposure apparatus and method of detecting error using the same | Sang-Yong Yu, Sang-Hee Lee | 2016-01-05 |
| 7560198 | Photo-mask having exposure blocking region and methods of designing and fabricating the same | Il-Yong Jang, Seong-woon Choi, Jeong Yun Lee, Sung-Hoon Jang | 2009-07-14 |
| 7369254 | System and method for measuring dimension of patterns formed on photomask | Dong Gun Lee, Seong-woon Choi, Sang-Yong Yu, Byung-Gook Kim | 2008-05-06 |
| 6566275 | Spinner apparatus with chemical supply nozzle and methods of forming patterns and performing etching using the same | — | 2003-05-20 |
| 6296975 | Photo mask of semiconductor device and method for manufacturing the same | Yong Hoon Kim, Kwang-soo No | 2001-10-02 |
| 5853921 | Methods of fabricating phase shift masks by controlling exposure doses | In-Kyun Shin, Ho-young Kang | 1998-12-29 |
| 5804338 | Photolithography masks including phase-shifting layers and related methods and structures | Sung Chul Lim | 1998-09-08 |
| 5741613 | Methods of forming half-tone phase-shift masks with reduced susceptiblity to parasitic sputtering | Jong-wook Kye, Sung-Gi Kim, Sung Chul Lim, In-Kyun Shin | 1998-04-21 |