Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9229327 | Electron beam exposure apparatus and method of detecting error using the same | Sang-Hee Lee, Seong-yong Moon | 2016-01-05 |
| 8304173 | Photomasks, methods of exposing a substrate to light, methods of forming a pattern, and methods of manufacturing a semiconductor device | Sung-Hyuck Kim, Gi-Sung Yoon | 2012-11-06 |
| 7369254 | System and method for measuring dimension of patterns formed on photomask | Dong Gun Lee, Seong-woon Choi, Seong-yong Moon, Byung-Gook Kim | 2008-05-06 |