Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8795929 | Pellicle having buffer zone and photomask structure having pellicle | In-Kyun Shin, Bum-hyun An | 2014-08-05 |
| 8304173 | Photomasks, methods of exposing a substrate to light, methods of forming a pattern, and methods of manufacturing a semiconductor device | Sang-Yong Yu, Gi-Sung Yoon | 2012-11-06 |
| 7595136 | Method of fabricating chrome-less phase shift mask | Gi-Sung Yoon, In-Kyun Shin | 2009-09-29 |
| 7432022 | Photo mask capable of improving resolution by utilizing polarization of light and method of manufacturing the same | In-Kyun Shin, Gi-Sung Yoon | 2008-10-07 |
| 7335449 | Masks each having a central main pattern region and a peripheral phantom pattern region with light-transmitting features in both pattern regions having the shame shape and pitch and methods of manufacturing the same | In-Kyun Shin, Dong-Hoon Chung | 2008-02-26 |