Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9436077 | Method of fabricating a pellicle frame | Jeong-Jin Kim, Chan-uk Jeon, Han-shin Lee, Jae-Hyuck Choi, Seung Wan Kim +2 more | 2016-09-06 |
| 8795929 | Pellicle having buffer zone and photomask structure having pellicle | Sung-Hyuck Kim, In-Kyun Shin | 2014-08-05 |
| 8404405 | Pellicle frame, pellicle, lithography apparatus, and method of fabricating the pellicle frame | Jung Jin Kim, Chan-uk Jeon, Jang-dong You, Sung Wan Kim, Ik-jun Kim +2 more | 2013-03-26 |