Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10394117 | Pellicle film including graphite-containing thin film for extreme ultraviolet lithography | Mun Ja Kim, Ji-Beom Yoo, Seul Gi Kim, Sang-Jin Cho, Myung-shik Chang | 2019-08-27 |
| 10001700 | Pellicle film including graphite-containing thin film for extreme ultraviolet lithography | Mun Ja Kim, Ji-Beom Yoo, Seul Gi Kim, Sang-Jin Cho, Myung-shik Chang | 2018-06-19 |
| 9436077 | Method of fabricating a pellicle frame | Jeong-Jin Kim, Bum-hyun An, Chan-uk Jeon, Han-shin Lee, Jae-Hyuck Choi +2 more | 2016-09-06 |
| 8404405 | Pellicle frame, pellicle, lithography apparatus, and method of fabricating the pellicle frame | Jung Jin Kim, Bum-hyun An, Chan-uk Jeon, Sung Wan Kim, Ik-jun Kim +2 more | 2013-03-26 |