Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10087348 | Pellicle including a water-soluble adhesive and photomask assembly including the pellicle | Byungchul Yoo, Sungyong Cho, Jaehyuck Choi, Jeongsu Yang, Donghoon Chung +5 more | 2018-10-02 |
| 9436077 | Method of fabricating a pellicle frame | Jeong-Jin Kim, Bum-hyun An, Chan-uk Jeon, Jae-Hyuck Choi, Seung Wan Kim +2 more | 2016-09-06 |
| 9341941 | Reflective photomask blank, reflective photomask, and integrated circuit device manufactured by using reflective photomask | Jae-Hyuck Choi, Soo-wan KOH, Jin Su Kim, Hyung-Ho Ko | 2016-05-17 |
| 8404405 | Pellicle frame, pellicle, lithography apparatus, and method of fabricating the pellicle frame | Jung Jin Kim, Bum-hyun An, Chan-uk Jeon, Jang-dong You, Sung Wan Kim +2 more | 2013-03-26 |
| 7989123 | Photomask including ion trapping layer and method of manufacturing semiconductor device using the photomask | Jae-Hyuck Choi, Hae-Young Jeong, Hyung-Ho Ko, Jin-sik Jung, Jong-Keun Oh +1 more | 2011-08-02 |