Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9798241 | Methods of manufacturing photomasks, methods of forming photoresist patterns and methods of manufacturing semiconductor devices | Sang Hyun Kim, Dong Gun Lee, Byoung-Hun Park, Byung-Gook Kim | 2017-10-24 |
| 9436077 | Method of fabricating a pellicle frame | Jeong-Jin Kim, Bum-hyun An, Han-shin Lee, Jae-Hyuck Choi, Seung Wan Kim +2 more | 2016-09-06 |
| 9370805 | Method of megasonic cleaning of an object | Jae-Hyuck Choi, Won Jung Kim, Ho-Young Kim, Hyung-Ho Ko, Jong-Keun Oh +1 more | 2016-06-21 |
| 9122177 | Apparatus for cleaning photomask | Yun-song Jeong, Hyung-Ho Ko, Sung-Jae Han, Kyung-noh Kim | 2015-09-01 |
| 8784672 | Photomasks and methods of manufacturing the same | Jong-Keun Oh, Dae-Hyuk Kang, Hyung-Ho Ko, Sung-Jae Han, Jung Jin Kim | 2014-07-22 |
| 8522172 | Method of forming photomask using calibration pattern, and photomask having calibration pattern | Young Keun Yoon, Hee-Bom Kim, Myoung-Soo Lee, Hak-Seung Han | 2013-08-27 |
| 8414708 | Method and apparatus for cleaning photomask | Yun-song Jeong, Hyung-Ho Ko, Sung-Jae Han, Kyung-noh Kim | 2013-04-09 |
| 8404405 | Pellicle frame, pellicle, lithography apparatus, and method of fabricating the pellicle frame | Jung Jin Kim, Bum-hyun An, Jang-dong You, Sung Wan Kim, Ik-jun Kim +2 more | 2013-03-26 |
| 8293020 | Method of megasonic cleaning of an object | Jae-Hyuck Choi, Won Jung Kim, Ho-Young Kim, Hyung-Ho Ko, Jong-Keun Oh +1 more | 2012-10-23 |
| 7812929 | Electrostatic chuck with temperature sensing unit, exposure equipment having the same, and method of detecting temperature from photomask | Myoung-Soo Lee | 2010-10-12 |
| 7632611 | Method of manufacturing rim type of photomask and photomask made by such method | Chang Hwan Kim, Gi-Sung Yoon, Sun Young Choi | 2009-12-15 |
| 7601467 | Method of manufacturing EUVL alternating phase-shift mask | Sung-min Huh, Hee-Bom Kim, Seong-woon Choi, Dong-Wan Kim | 2009-10-13 |