Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072679 | Microscope and method of providing image data using the same | Dong-Wan Kim, Dong Gun Lee | 2011-12-06 |
| 7927767 | Reflective photomasks and methods of determining layer thicknesses of the same | Byoung-Sup Ahn, Chang-kwon Hwangbo, Hee Kang | 2011-04-19 |
| 7855034 | Reflecting mask, apparatus for fixing the reflecting mask and method of fixing the reflecting mask | Suk Ho Lee | 2010-12-21 |
| 7754398 | Photo mask having assist pattern and method of fabricating the same | Hee-Bom Kim, Jeung-woo Lee | 2010-07-13 |
| 7745072 | Method of correcting critical dimension in photomask and photomask having corrected critical dimension using the method | Jin-sik Jung, Hee-Bom Kim, Hoon Kim | 2010-06-29 |
| 7745068 | Binary photomask having a compensation layer | Jin-sik Jung, Hee-Bom Kim, Woo-Sung Han | 2010-06-29 |
| 7642017 | Reflective photomask, method of fabricating the same, and reflective blank photomask | Hee-Bom Kim | 2010-01-05 |
| 7601467 | Method of manufacturing EUVL alternating phase-shift mask | Hee-Bom Kim, Seong-woon Choi, Dong-Wan Kim, Chan-uk Jeon | 2009-10-13 |
| 7563547 | Photomask and method of manufacturing the same | Jin Hyung Park | 2009-07-21 |
| 7389491 | Methods, systems and computer program products for correcting photomask using aerial images and boundary regions | Ji-Soong Park, Seong-woon Choi, In-Kyun Shin | 2008-06-17 |