Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10223494 | Semiconductor device manufacturing method and mask manufacturing method | So-eun Shin, Suk Ho Lee, Jung-wook Shon | 2019-03-05 |
| 9116438 | Method of correcting flare and method of preparing extreme ultra violet mask | Young Mi Lee, In-Sung Kim, Byoung-Sup Ahn, Jae-pil Shin | 2015-08-25 |
| 7389491 | Methods, systems and computer program products for correcting photomask using aerial images and boundary regions | Sung-min Huh, Seong-woon Choi, In-Kyun Shin | 2008-06-17 |
| 6770403 | Mask for a photolithography process and method of fabricating the same | Sang-Uhk Rhie | 2004-08-03 |