Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10012900 | Method of correcting mask pattern and method of manufacturing reticle | Jong Su Kim, Shuichi Tamamushi, Sung Il Lee, Jin Choi | 2018-07-03 |
| 9671686 | Exposure methods using e-beams and methods of manufacturing masks and semiconductor devices therefrom | Jin Sun Karoline Choi, Byoung-Sup Ahn, Sang-Hee Lee | 2017-06-06 |
| 9583305 | Exposure method using control of settling times and methods of manufacturing integrated circuit devices by using the same | Yong Seok Jung, Shuichi Tamamushi, In-Hwan Noh, Sang-Hee Lee, Jin Choi | 2017-02-28 |
| 8795929 | Pellicle having buffer zone and photomask structure having pellicle | Sung-Hyuck Kim, Bum-hyun An | 2014-08-05 |
| 7595136 | Method of fabricating chrome-less phase shift mask | Gi-Sung Yoon, Sung-Hyuck Kim | 2009-09-29 |
| 7541118 | Phase shift mask | Myung-Ah Kang | 2009-06-02 |
| 7432022 | Photo mask capable of improving resolution by utilizing polarization of light and method of manufacturing the same | Sung-Hyuck Kim, Gi-Sung Yoon | 2008-10-07 |
| 7389491 | Methods, systems and computer program products for correcting photomask using aerial images and boundary regions | Ji-Soong Park, Sung-min Huh, Seong-woon Choi | 2008-06-17 |
| 7387965 | Reference pattern for creating a defect recognition level, method of fabricating the same and method of inspecting defects using the same | Won Il Cho, Jin Hyung Park | 2008-06-17 |
| 7338736 | Method of fabricating a phase shift mask | Myung-Ah Kang | 2008-03-04 |
| 7335449 | Masks each having a central main pattern region and a peripheral phantom pattern region with light-transmitting features in both pattern regions having the shame shape and pitch and methods of manufacturing the same | Sung-Hyuck Kim, Dong-Hoon Chung | 2008-02-26 |
| 7112390 | Method of manufacturing chromeless phase shift mask | Myung-Ah Kang | 2006-09-26 |
| 7100322 | Method of manufacturing an alternating phase shift mask | Myung-Ah Kang | 2006-09-05 |
| 6919149 | Wave guided alternating phase shift mask and fabrication method thereof | Seong-hyuck Kim, Tae-Moon Jeong | 2005-07-19 |
| 6866968 | Photomask for off-axis illumination and method of fabricating the same | Jung Min Sohn, Hee-sun Yoon, Seong-woon Choi | 2005-03-15 |
| 5853921 | Methods of fabricating phase shift masks by controlling exposure doses | Seong-yong Moon, Ho-young Kang | 1998-12-29 |
| 5814424 | Half tone phase shift masks with staircase regions and methods of fabricating the same | — | 1998-09-29 |
| 5741613 | Methods of forming half-tone phase-shift masks with reduced susceptiblity to parasitic sputtering | Seong-yong Moon, Jong-wook Kye, Sung-Gi Kim, Sung Chul Lim | 1998-04-21 |