Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7541118 | Phase shift mask | In-Kyun Shin | 2009-06-02 |
| 7338736 | Method of fabricating a phase shift mask | In-Kyun Shin | 2008-03-04 |
| 7112390 | Method of manufacturing chromeless phase shift mask | In-Kyun Shin | 2006-09-26 |
| 7100322 | Method of manufacturing an alternating phase shift mask | In-Kyun Shin | 2006-09-05 |