Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7393615 | Mask for use in measuring flare, method of manufacturing the mask, method of identifying flare-affected region on wafer, and method of designing new mask to correct for flare | Won-tai Ki, Seong-woon Choi, Shun-Yong Zinn, Woo-Sung Han, Jung Min Sohn | 2008-07-01 |
| 7341809 | Photomask, method for manufacturing the same, and method for measuring optical characteristics of wafer exposure system using the photomask during operation | Seong-hyuck Kim, Seong-woon Choi | 2008-03-11 |
| 7070891 | Photomask, method for manufacturing the same, and method for measuring optical characteristics of wafer exposure system using the photomask during operation | Seong-hyuck Kim, Seong-woon Choi | 2006-07-04 |
| 6919149 | Wave guided alternating phase shift mask and fabrication method thereof | Seong-hyuck Kim, In-Kyun Shin | 2005-07-19 |
| 6835507 | Mask for use in measuring flare, method of manufacturing the mask, method of identifying flare-affected region on wafer, and method of designing new mask to correct for flare | Won-tai Ki, Seong-woon Choi, Shun-Yong Zinn, Woo-Sung Han, Jung Min Sohn | 2004-12-28 |