Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10274820 | Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the same | Hwanchul JEON, Munja Kim, Sungwon Kwon, Byunggook Kim, Roman Chalykh +1 more | 2019-04-30 |
| 10087348 | Pellicle including a water-soluble adhesive and photomask assembly including the pellicle | Byungchul Yoo, Sungyong Cho, Jeongsu Yang, Donghoon Chung, Han-shin Lee +5 more | 2018-10-02 |
| 9952502 | Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the same | Hwanchul JEON, Munja Kim, Sungwon Kwon, Byunggook Kim, Roman Chalykh +1 more | 2018-04-24 |
| 9766540 | Method of forming photomask | Jong-Keun Oh, Hyungho Ko, Inkyun SHIN, JunYoul Choi | 2017-09-19 |
| 9703186 | Mask including pellicle, pellicle repairing apparatus, and substrate manufacturing equipment | Mun Ja Kim, Byunggook Kim, Jongju Park | 2017-07-11 |
| 9612528 | Methods of manufacturing pellicles having graphite layers | Munja Kim, Byunggook Kim | 2017-04-04 |
| 9223199 | Photomask and method of forming the same | Jong-Keun Oh, Hyungho Ko, Inkyun SHIN, JunYoul Choi | 2015-12-29 |