Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11372323 | Phase-shift mask for extreme ultraviolet lithography | Hwanseok Seo, Seongsue Kim, Taehoon Lee | 2022-06-28 |
| 10719008 | Phase-shift mask for extreme ultraviolet lithography | Hwanseok Seo, Seongsue Kim, Taehoon Lee | 2020-07-21 |
| 10274820 | Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the same | Hwanchul JEON, Munja Kim, Sungwon Kwon, Byunggook Kim, Yongseok Jung +1 more | 2019-04-30 |
| 9952502 | Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the same | Hwanchul JEON, Munja Kim, Sungwon Kwon, Byunggook Kim, Yongseok Jung +1 more | 2018-04-24 |