Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12099293 | Phase shift mask for extreme ultraviolet lithography and a method of manufacturing a semiconductor device using the same | Seongsue Kim, Changyoung Jeong | 2024-09-24 |
| 11774846 | Phase shift masks for extreme ultraviolet lithography | Seongsue Kim, Dongwan KIM | 2023-10-03 |
| 11487197 | Phase shift masks for extreme ultraviolet lithography | Seongsue Kim, Dongwan KIM | 2022-11-01 |
| 11372323 | Phase-shift mask for extreme ultraviolet lithography | Seongsue Kim, Taehoon Lee, Roman Chalykh | 2022-06-28 |
| 10719008 | Phase-shift mask for extreme ultraviolet lithography | Seongsue Kim, Taehoon Lee, Roman Chalykh | 2020-07-21 |