Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12099293 | Phase shift mask for extreme ultraviolet lithography and a method of manufacturing a semiconductor device using the same | Hwanseok Seo, Changyoung Jeong | 2024-09-24 |
| 11852583 | Apparatus and method for measuring phase of extreme ultraviolet (EUV) mask and method of fabricating EUV mask including the method | Jongju Park, Raewon Yi, Hakseung Han | 2023-12-26 |
| 11774846 | Phase shift masks for extreme ultraviolet lithography | Dongwan KIM, Hwanseok Seo | 2023-10-03 |
| 11635371 | Apparatus and method for measuring phase of extreme ultraviolet (EUV) mask and method of fabricating EUV mask including the method | Jongju Park, Raewon Yi, Hakseung Han | 2023-04-25 |
| 11487197 | Phase shift masks for extreme ultraviolet lithography | Dongwan KIM, Hwanseok Seo | 2022-11-01 |
| 11372323 | Phase-shift mask for extreme ultraviolet lithography | Hwanseok Seo, Taehoon Lee, Roman Chalykh | 2022-06-28 |
| 10719008 | Phase-shift mask for extreme ultraviolet lithography | Hwanseok Seo, Taehoon Lee, Roman Chalykh | 2020-07-21 |
| 10401602 | EUV light generator including collecting mirror having drip hole | Hoyeon Kim | 2019-09-03 |
| 10126642 | Reflective photomask, method of fabricating the same, and exposure apparatus using the reflective photomask | Insung Kim | 2018-11-13 |
| 9996001 | Reticle and exposure apparatus including the same | Insung Kim | 2018-06-12 |
| 9466490 | Beam shapers, annealing systems employing the same, methods of heat treating substrates and methods of fabricating semiconductor devices | Sanghyun Kim, Chalykh Roman, Jongju Park, Donggun Lee | 2016-10-11 |
| 9087698 | Beam shapers, annealing systems employing the same, methods of heat treating substrates and methods of fabricating semiconductor devices | Sanghyun Kim, Chalykh Roman, Jongju Park, Donggun Lee | 2015-07-21 |