Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12346022 | Method of fabricating pellicle structure | Mun Ja Kim, Ji-Beom Yoo, Ki Bong Nam, Jin Ho Yeo, Qicheng Hu | 2025-07-01 |
| 12281243 | Method of removing an adhesive for an EUV mask and method of reusing an EUV mask | Byungchul Yoo, Byunghoon Lee, Myungjun KIM, Jikang KIM, Jeonghwan MIN +1 more | 2025-04-22 |
| 12258494 | Adhesive for pellicle, pellicle for photo mask and method for manufacturing the same | Mun Ja Kim | 2025-03-25 |
| 12099293 | Phase shift mask for extreme ultraviolet lithography and a method of manufacturing a semiconductor device using the same | Hwanseok Seo, Seongsue Kim | 2024-09-24 |
| 12072637 | Lithography method using multi-scale simulation, semiconductor device manufacturing method and exposure equipment | Byunghoon Lee, Byunggook Kim, Maenghyo Cho, Muyoung Kim, Junghwan Moon +3 more | 2024-08-27 |
| 12032281 | Pellicle cleaning apparatus and pellicle cleaning method using the same | Byunghoon Lee, Jin Goo Park, Tae Gon Kim, Sanguk Park, Jinho AHN +1 more | 2024-07-09 |
| 11662665 | Lithography method using multiscale simulation, and method of manufacturing semiconductor device and exposure equipment based on the lithography method | Byunghoon Lee, Maenghyo Cho, Muyoung Kim, Junghwan Moon, Sungwoo Park +1 more | 2023-05-30 |
| 11493850 | Lithography method using multi-scale simulation, semiconductor device manufacturing method and exposure equipment | Byunghoon Lee, Byunggook Kim, Maenghyo Cho, Muyoung Kim, Junghwan Moon +3 more | 2022-11-08 |
| 11448957 | Pellicle transfer apparatus and method | Mun Ja Kim | 2022-09-20 |
| 11262648 | Pellicle for photomask and method of fabricating the same | Mun Ja Kim | 2022-03-01 |
| 10866507 | Pellicle and reticle including the same | Yongseung Moon, Heebom Kim | 2020-12-15 |
| 10809614 | Pellicle for photomask and method of fabricating the same | Mun Ja Kim | 2020-10-20 |