| 12346022 |
Method of fabricating pellicle structure |
Mun Ja Kim, Ji-Beom Yoo, Ki Bong Nam, Jin Ho Yeo, Qicheng Hu |
2025-07-01 |
| 12281243 |
Method of removing an adhesive for an EUV mask and method of reusing an EUV mask |
Byungchul Yoo, Byunghoon Lee, Myungjun KIM, Jikang KIM, Jeonghwan MIN +1 more |
2025-04-22 |
| 12258494 |
Adhesive for pellicle, pellicle for photo mask and method for manufacturing the same |
Mun Ja Kim |
2025-03-25 |
| 12099293 |
Phase shift mask for extreme ultraviolet lithography and a method of manufacturing a semiconductor device using the same |
Hwanseok Seo, Seongsue Kim |
2024-09-24 |
| 12072637 |
Lithography method using multi-scale simulation, semiconductor device manufacturing method and exposure equipment |
Byunghoon Lee, Byunggook Kim, Maenghyo Cho, Muyoung Kim, Junghwan Moon +3 more |
2024-08-27 |
| 12032281 |
Pellicle cleaning apparatus and pellicle cleaning method using the same |
Byunghoon Lee, Jin Goo Park, Tae Gon Kim, Sanguk Park, Jinho AHN +1 more |
2024-07-09 |
| 11662665 |
Lithography method using multiscale simulation, and method of manufacturing semiconductor device and exposure equipment based on the lithography method |
Byunghoon Lee, Maenghyo Cho, Muyoung Kim, Junghwan Moon, Sungwoo Park +1 more |
2023-05-30 |
| 11493850 |
Lithography method using multi-scale simulation, semiconductor device manufacturing method and exposure equipment |
Byunghoon Lee, Byunggook Kim, Maenghyo Cho, Muyoung Kim, Junghwan Moon +3 more |
2022-11-08 |
| 11448957 |
Pellicle transfer apparatus and method |
Mun Ja Kim |
2022-09-20 |
| 11262648 |
Pellicle for photomask and method of fabricating the same |
Mun Ja Kim |
2022-03-01 |
| 10866507 |
Pellicle and reticle including the same |
Yongseung Moon, Heebom Kim |
2020-12-15 |
| 10809614 |
Pellicle for photomask and method of fabricating the same |
Mun Ja Kim |
2020-10-20 |
