Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11409193 | Reticle in an apparatus for extreme ultraviolet exposure | Mankyu Kang, Hoon Kim, Jongkeun OH, Minho Kim | 2022-08-09 |
| 11086210 | Photomask, method of fabricating the same, and method of manufacturing semiconductor device using the same | Yigwon KIM, Sangjin KIM, Heeyoung Go, Hoon Kim, Hong Choi +1 more | 2021-08-10 |
| 10866507 | Pellicle and reticle including the same | Yongseung Moon, Changyoung Jeong | 2020-12-15 |
| 10224178 | Methods, systems and computer program products configured to adjust a critical dimension of reticle patterns used to fabricate semiconductor devices | Yongseok Jung, Sungwon Kwon, Donggun Lee | 2019-03-05 |
| 7629087 | Photomask, method of making a photomask and photolithography method and system using the same | Sungmin Huh, Donggun Lee, Chanuk Jeon | 2009-12-08 |