Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11143974 | Cleaning method and cleaning system for reticle pod | Sungyong Cho | 2021-10-12 |
| 10866507 | Pellicle and reticle including the same | Heebom Kim, Changyoung Jeong | 2020-12-15 |
| 10831115 | Reticle management method and semiconductor device fabrication method including the same | Sungyong Cho | 2020-11-10 |