Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8216748 | Extreme ultraviolet photomask | Ilyong Jang, SangGyun Woo | 2012-07-10 |
| 8048595 | Extreme ultraviolet photomask and methods and apparatuses for manufacturing the extreme ultraviolet photomask | Ilyong Jang, SangGyun Woo | 2011-11-01 |
| 7629087 | Photomask, method of making a photomask and photolithography method and system using the same | Heebom Kim, Donggun Lee, Chanuk Jeon | 2009-12-08 |