Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8216748 | Extreme ultraviolet photomask | Ilyong Jang, Sungmin Huh | 2012-07-10 |
| 8048595 | Extreme ultraviolet photomask and methods and apparatuses for manufacturing the extreme ultraviolet photomask | Ilyong Jang, Sungmin Huh | 2011-11-01 |
| 6849378 | Photosensitive polymers, resist compositions comprising the same, and methods for forming photoresistive patterns | Sangjun Choi, Hyunwo Kim, Joontae Moon | 2005-02-01 |
| 6730458 | Method for forming fine patterns through effective glass transition temperature reduction | Hyunwoo KIM | 2004-05-04 |