Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11086210 | Photomask, method of fabricating the same, and method of manufacturing semiconductor device using the same | Yigwon KIM, Sangjin KIM, Heebom Kim, Hoon Kim, Hong Choi +1 more | 2021-08-10 |
| 10754254 | Extreme ultraviolet (EUV) exposure apparatus and method of manufacturing semiconductor device using the same | Keunhee Bai, Jinhong Park, Jinseok Heo, Seongchul Hong | 2020-08-25 |