Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12313979 | Correcting apparatus of extreme ultraviolet (EUV) photomask and correcting method of EUV photomask | Sanguk Park, Yongwoo Kim, Jongju Park, Youngchang SEO | 2025-05-27 |
| 12259647 | Method of manufacturing extreme ultraviolet (EUV) photomask and method and apparatus for correcting EUV photomask | Sanguk Park, Gyeongcheon Jo, Jongju Park | 2025-03-25 |
| 11409193 | Reticle in an apparatus for extreme ultraviolet exposure | Mankyu Kang, Hoon Kim, Minho Kim, Heebom Kim | 2022-08-09 |