Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12259647 | Method of manufacturing extreme ultraviolet (EUV) photomask and method and apparatus for correcting EUV photomask | Jongkeun OH, Sanguk Park, Jongju Park | 2025-03-25 |