Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12313979 | Correcting apparatus of extreme ultraviolet (EUV) photomask and correcting method of EUV photomask | Sanguk Park, Yongwoo Kim, Youngchang SEO, Jongkeun OH | 2025-05-27 |
| 12259647 | Method of manufacturing extreme ultraviolet (EUV) photomask and method and apparatus for correcting EUV photomask | Jongkeun OH, Sanguk Park, Gyeongcheon Jo | 2025-03-25 |
| 11934092 | Method of annealing reflective photomask by using laser | Hakseung Han, Sanguk Park, Raewon Yi | 2024-03-19 |
| 11852583 | Apparatus and method for measuring phase of extreme ultraviolet (EUV) mask and method of fabricating EUV mask including the method | Raewon Yi, Hakseung Han, Seongsue Kim | 2023-12-26 |
| 11635371 | Apparatus and method for measuring phase of extreme ultraviolet (EUV) mask and method of fabricating EUV mask including the method | Raewon Yi, Hakseung Han, Seongsue Kim | 2023-04-25 |
| 11506968 | Method of annealing reflective photomask by using laser | Hakseung Han, Sanguk Park, Raewon Yi | 2022-11-22 |
| 10762001 | Memory system and operation method thereof | — | 2020-09-01 |
| 9703186 | Mask including pellicle, pellicle repairing apparatus, and substrate manufacturing equipment | Mun Ja Kim, Byunggook Kim, Jaehyuck Choi | 2017-07-11 |
| 9466490 | Beam shapers, annealing systems employing the same, methods of heat treating substrates and methods of fabricating semiconductor devices | Sanghyun Kim, Chalykh Roman, Donggun Lee, Seongsue Kim | 2016-10-11 |
| 9087698 | Beam shapers, annealing systems employing the same, methods of heat treating substrates and methods of fabricating semiconductor devices | Sanghyun Kim, Chalykh Roman, Donggun Lee, Seongsue Kim | 2015-07-21 |
| 8697318 | Method of forming photomasks and photomasks formed by the same | Sang Hyun Kim, Donggun Lee | 2014-04-15 |