| 12260539 |
Apparatus and method of measuring uniformity based on pupil image and method of manufacturing mask by using the method |
Minho Kim, Jiyoung Kim, Jinback Park |
2025-03-25 |
| 11934092 |
Method of annealing reflective photomask by using laser |
Sanguk Park, Jongju Park, Raewon Yi |
2024-03-19 |
| 11852583 |
Apparatus and method for measuring phase of extreme ultraviolet (EUV) mask and method of fabricating EUV mask including the method |
Jongju Park, Raewon Yi, Seongsue Kim |
2023-12-26 |
| 11635371 |
Apparatus and method for measuring phase of extreme ultraviolet (EUV) mask and method of fabricating EUV mask including the method |
Jongju Park, Raewon Yi, Seongsue Kim |
2023-04-25 |
| 11562477 |
Apparatus and method of measuring uniformity based on pupil image and method of manufacturing mask by using the method |
Minho Kim, Jiyoung Kim, Jinback Park |
2023-01-24 |
| 11506968 |
Method of annealing reflective photomask by using laser |
Sanguk Park, Jongju Park, Raewon Yi |
2022-11-22 |
