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| 12258494 |
Adhesive for pellicle, pellicle for photo mask and method for manufacturing the same |
Changyoung Jeong |
2025-03-25 |
| 12018183 |
Adhesive composition, method for preparing the same, reticle assembly including the same, and method for fabricating reticle assembly including the same |
Byungchul Yoo, Haeshin Lee, Chang-Young Jeong, Yunhan LEE |
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| 11892767 |
Stud attachment device and stud attachment method with independent temperature/pressure control |
Byungchul Yoo, Sunghoon Park |
2024-02-06 |
| 11729896 |
Apparatus for generating extreme ultraviolet (EUV), method of manufacturing the same, and EUV system |
Jihoon Na, Jaewhan Sung, Byungchul Yoo, Jibeom Yoo, Hakseok Lee +2 more |
2023-08-15 |
| 11448957 |
Pellicle transfer apparatus and method |
Changyoung Jeong |
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| 11262648 |
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Changyoung Jeong |
2022-03-01 |
| 11073757 |
Methods of manufacturing pellicle assembly and photomask assembly |
Seulgi KIM, Kibong Nam, Jinho Yeo, Jibeom Yoo |
2021-07-27 |
| 11067887 |
Apparatus for manufacturing pellicle |
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2021-07-20 |
| 10969702 |
Extreme ultraviolet lithography apparatus |
Eokbong KIM |
2021-04-06 |
| 10809614 |
Pellicle for photomask and method of fabricating the same |
Changyoung Jeong |
2020-10-20 |
| 10747104 |
Method of manufacturing pellicle and apparatus for assembling pellicle |
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2020-08-18 |
| 10437143 |
Pellicle for exposure to extreme ultraviolet light, photomask assembly, and method of manufacturing the pellicle |
Hwan Chul Jeon, Sung Won Kwon, Hee-Bom Kim, Chang-Young Jeong |
2019-10-08 |
| 10394117 |
Pellicle film including graphite-containing thin film for extreme ultraviolet lithography |
Ji-Beom Yoo, Seul Gi Kim, Sang-Jin Cho, Myung-shik Chang, Jang-dong You |
2019-08-27 |
| 10345698 |
Method for fabricating semiconductor device |
Ji-Beom Yoo, Sung Won Kwon, Dong Wook Shin, Jin Su Kim, Hwan Chul Jeon |
2019-07-09 |
| 10103071 |
Pattern inspection methods and methods of fabricating reticles using the same via directing charged particle beams through discharge layers |
Eokbong KIM, Jin Sung Choi, Kijung Son |
2018-10-16 |
| 10065402 |
Method of manufacturing pellicle assembly and method of photomask assembly including the same |
Byung-Gook Kim, Hwan Chul Jeon, Ji-Beom Yoo, Dong Wook Shin, Taesung Kim +1 more |
2018-09-04 |
| 10001700 |
Pellicle film including graphite-containing thin film for extreme ultraviolet lithography |
Ji-Beom Yoo, Seul Gi Kim, Sang-Jin Cho, Myung-shik Chang, Jang-dong You |
2018-06-19 |
| 9703186 |
Mask including pellicle, pellicle repairing apparatus, and substrate manufacturing equipment |
Byunggook Kim, Jongju Park, Jaehyuck Choi |
2017-07-11 |
| 9690190 |
Pellicles and methods of manufacturing the same |
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2017-06-27 |
| 9176375 |
Methods of reducing a registration error of a photomask, and related photomasks and methods of manufacturing an integrated circuit |
Sang Hyun Kim, Seong-sue Kim, Dong Gun Lee, Chalykh Roman |
2015-11-03 |
| 8110979 |
Inorganic electroluminescence device, display apparatus having the same and method thereof |
Shang Hyeun PARK, Ji-Beom Yoo, Min-jong Bae, Tae-Won Jeong |
2012-02-07 |
