Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11067887 | Apparatus for manufacturing pellicle | Mun Ja Kim, Ji-Beom Yoo, Soo-Young Kim, Hee-Bom Kim, Seul Gi Kim +2 more | 2021-07-20 |
| 10747104 | Method of manufacturing pellicle and apparatus for assembling pellicle | Mun Ja Kim, Ji-Beom Yoo, Soo-Young Kim, Hee-Bom Kim, Seul Gi Kim +2 more | 2020-08-18 |
| 10437143 | Pellicle for exposure to extreme ultraviolet light, photomask assembly, and method of manufacturing the pellicle | Mun Ja Kim, Sung Won Kwon, Hee-Bom Kim, Chang-Young Jeong | 2019-10-08 |
| 10345698 | Method for fabricating semiconductor device | Ji-Beom Yoo, Sung Won Kwon, Dong Wook Shin, Mun Ja Kim, Jin Su Kim | 2019-07-09 |
| 10073337 | Pellicle and photomask assembly including the same | Yong Seok Jung, Byung-Gook Kim, Jae-Hyuck Choi, Sung Won Kwon | 2018-09-11 |
| 10065402 | Method of manufacturing pellicle assembly and method of photomask assembly including the same | Mun Ja Kim, Byung-Gook Kim, Ji-Beom Yoo, Dong Wook Shin, Taesung Kim +1 more | 2018-09-04 |