Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11729896 | Apparatus for generating extreme ultraviolet (EUV), method of manufacturing the same, and EUV system | Jihoon Na, Mun Ja Kim, Jaewhan Sung, Byungchul Yoo, Hakseok Lee +2 more | 2023-08-15 |
| 11073757 | Methods of manufacturing pellicle assembly and photomask assembly | Mun Ja Kim, Seulgi KIM, Kibong Nam, Jinho Yeo | 2021-07-27 |
| 8663593 | Method for fabricating three dimensional graphene structures using catalyst templates | Shashikant P. Patole, Hyunmyoung Lee | 2014-03-04 |