Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12072637 | Lithography method using multi-scale simulation, semiconductor device manufacturing method and exposure equipment | Byunghoon Lee, Changyoung Jeong, Byunggook Kim, Maenghyo Cho, Junghwan Moon +3 more | 2024-08-27 |
| 11662665 | Lithography method using multiscale simulation, and method of manufacturing semiconductor device and exposure equipment based on the lithography method | Byunghoon Lee, Maenghyo Cho, Changyoung Jeong, Junghwan Moon, Sungwoo Park +1 more | 2023-05-30 |
| 11493850 | Lithography method using multi-scale simulation, semiconductor device manufacturing method and exposure equipment | Byunghoon Lee, Changyoung Jeong, Byunggook Kim, Maenghyo Cho, Junghwan Moon +3 more | 2022-11-08 |