Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12281243 | Method of removing an adhesive for an EUV mask and method of reusing an EUV mask | Byungchul Yoo, Byunghoon Lee, Myungjun KIM, Jeonghwan MIN, Kyoungchae SEO +1 more | 2025-04-22 |
| 10087348 | Pellicle including a water-soluble adhesive and photomask assembly including the pellicle | Byungchul Yoo, Sungyong Cho, Jaehyuck Choi, Jeongsu Yang, Donghoon Chung +5 more | 2018-10-02 |