Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12032281 | Pellicle cleaning apparatus and pellicle cleaning method using the same | Byunghoon Lee, Tae Gon Kim, Sanguk Park, Changyoung Jeong, Jinho AHN +1 more | 2024-07-09 |
| 11382412 | Method and apparatus for cleaning PVA brush | Jung Hwan Lee, Satomi Hamada | 2022-07-12 |
| 6866784 | Slurry recycling system and method for CMP apparatus | Jung Hoon Chang, Kwang Jun Lee | 2005-03-15 |
| 5803980 | De-ionized water/ozone rinse post-hydrofluoric processing for the prevention of silicic acid residue | Michael F. Pas | 1998-09-08 |