Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11382412 | Method and apparatus for cleaning PVA brush | Jin Goo Park, Jung Hwan Lee | 2022-07-12 |
| 10229841 | Wafer drying apparatus and wafer drying method | Masayoshi Imai | 2019-03-12 |
| 8608858 | Substrate cleaning apparatus and method for determining timing of replacement of cleaning member | — | 2013-12-17 |
| 6595220 | Apparatus for conveying a workpiece | Toshiro Maekawa, Riichiro Aoki, Shoichi Kodama, Hiromi Yajima | 2003-07-22 |
| 6221171 | Method and apparatus for conveying a workpiece | Toshiro Maekawa, Riichiro Aoki, Shoichi Kodama, Hiromi Yajima | 2001-04-24 |
| 6106635 | Washing method and washing apparatus | Toshiro Maekawa | 2000-08-22 |
| 5966765 | Cleaning apparatus | Toshiro Maekawa, Toshiya Takeuchi | 1999-10-19 |
| 5860181 | Method of and apparatus for cleaning workpiece | Toshiro Maekawa, Koji Ono, Atsushi Shigeta, Masako Kodera | 1999-01-19 |