Issued Patents All Time
Showing 1–25 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10207390 | Processing end point detection method, polishing method, and polishing apparatus | Noburu Shimizu, Shinro Ohta, Koji Maruyama, Yoichi Kobayashi, Ryuichiro Mitani +1 more | 2019-02-19 |
| 8777694 | Polishing endpoint detection method | Shinrou Ohta | 2014-07-15 |
| 8696924 | Polishing apparatus and polishing method | Mitsuo Tada, Taro Takahashi, Motohiro Niijima, Shinro Ohta | 2014-04-15 |
| 8685857 | Chemical mechanical polishing method of organic film and method of manufacturing semiconductor device | Yukiteru Matsui, Gaku Minamihaba, Yoshikuni Tateyama, Hiroyuki Yano | 2014-04-01 |
| 8568199 | Polishing endpoint detection apparatus | Shinrou Ohta | 2013-10-29 |
| 8554356 | Processing end point detection method, polishing method, and polishing apparatus | Noburu Shimizu, Shinro Ohta, Koji Maruyama, Yoichi Kobayashi, Ryuichiro Mitani +1 more | 2013-10-08 |
| 8506362 | Polishing apparatus and polishing method | Dai Fukushima, Tamami Takahashi, Kenya Ito, Masaya Seki, Hiroaki Kusa | 2013-08-13 |
| 8388409 | Substrate polishing apparatus | Hidetaka Nakao, Yasumitsu Kawabata, Yoshifumi Katsumata, Naoki Ozawa, Tatsuya Sasaki | 2013-03-05 |
| 8152598 | Substrate treating method and substrate treating apparatus | Dai Fukushima | 2012-04-10 |
| 8119517 | Chemical mechanical polishing method and method of manufacturing semiconductor device | Hirotaka Shida, Yukiteru Matsui, Shinichi Hirasawa, Hirokazu Kato, Masako Kinoshita +2 more | 2012-02-21 |
| 8114776 | Method of manufacturing semiconductor device | Hajime Eda, Yukiteru Matsui, Takatoshi Ono, Satoko Seta | 2012-02-14 |
| 8084364 | Method of fabricating semiconductor device | Shunsuke Doi | 2011-12-27 |
| 7767472 | Substrate processing method and substrate processing apparatus | Gen Toyota, Hiroyuki Yano, Kunio Oishi, Kenya Ito, Masayuki Nakanishi +1 more | 2010-08-03 |
| 7744445 | Polishing apparatus and polishing method | Takeo Kubota, Gen Toyota, Tamami Takahashi, Daisaku Fukuoka, Kenya Ito | 2010-06-29 |
| 7700489 | Method of manufacturing a semiconductor device | Yukiteru Matsui, Gaku Minamihaba, Hiroyuki Yano | 2010-04-20 |
| 7638439 | Peripheral processing method and method of manufacturing a semiconductor device | Takeo Kubota, Kaori Yomogihara, Makoto Honda, Hirokazu Ezawa | 2009-12-29 |
| 7452819 | Chemical mechanical polishing method of organic film and method of manufacturing semiconductor device | Yukiteru Matsui, Gaku Minamihaba, Yoshikuni Tateyama, Hiroyuki Yano | 2008-11-18 |
| 7435682 | Method of manufacturing semiconductor device | Yukiteru Matsui, Gaku Minamihaba, Hiroyuki Yano, Satoko Seta, Hirokazu Kato | 2008-10-14 |
| 7416942 | Method for manufacturing semiconductor device | Yukiteru Matsui, Shinichi Hirasawa, Kiyotaka Miyano, Takeshi Nishioka, Hiroyuki Yano | 2008-08-26 |
| 7413989 | Method of manufacturing semiconductor device | Kazuhiko Ida, Yoshitaka Matsui | 2008-08-19 |
| 7402521 | Method for chemically mechanically polishing organic film, method of manufacturing semiconductor device, and program therefor | Yukiteru Matsui, Gaku Minamihaba, Hiroyuki Yano | 2008-07-22 |
| 7241205 | Method of processing a substrate | Gen Toyota, Hiroyuki Yano | 2007-07-10 |
| 7217662 | Method of processing a substrate | Gen Toyota, Hiroyuki Yano | 2007-05-15 |
| 7198552 | Polishing apparatus | Toyomi Nishi, Tetsuji Togawa, Harumitsu Saito, Manabu Tsujimura, Hiromi Yajima +7 more | 2007-04-03 |
| 7092045 | Projection-type display apparatus | Fumio Haruna, Tsuneyuki Nozawa | 2006-08-15 |