Issued Patents All Time
Showing 1–25 of 147 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12237194 | Substrate transporter and substrate processing apparatus including substrate transporter | Akihiro Yazawa, Takashi Koba, Kenichi Kobayashi, Kenichi Akazawa, Fong-Jie Du +5 more | 2025-02-25 |
| 12138734 | Substrate polishing apparatus and polishing liquid discharge method in substrate polishing apparatus | Kenichi Kobayashi | 2024-11-12 |
| 11648638 | Substrate polishing apparatus and polishing liquid discharge method in substrate polishing apparatus | Kenichi Kobayashi | 2023-05-16 |
| 11618123 | Polishing method and polishing apparatus | Yu Ishii, Atsushi Yoshida | 2023-04-04 |
| 11607769 | Polishing apparatus of substrate | Hiroshi Sobukawa, Masahiro Hatakeyama | 2023-03-21 |
| 11597051 | Method for polishing substrate including functional chip | Hiroshi Sobukawa, Masahiro Hatakeyama | 2023-03-07 |
| 11548113 | Method and apparatus for polishing a substrate | Makoto Fukushima, Shingo Togashi, Tomoshi Inoue | 2023-01-10 |
| 11511389 | Polishing head and polishing apparatus | Kenichi Akazawa, Makoto Kashiwagi, Yu Ishii, Atsushi Yoshida, Kenichi Kobayashi +1 more | 2022-11-29 |
| 11440161 | Polishing head for face-up type polishing apparatus, polishing apparatus including the polishing head, and polishing method using the polishing apparatus | Kenichi Kobayashi | 2022-09-13 |
| 11373894 | Substrate processing apparatus and substrate holding apparatus | Kenichi Kobayashi | 2022-06-28 |
| 11224956 | Polishing apparatus | Osamu Nabeya, Makoto Fukushima, Hozumi Yasuda | 2022-01-18 |
| 10493588 | Polishing apparatus and polishing method | Masaya Seki, Masayuki Nakanishi, Naoki Matsuda, Atsushi Yoshida | 2019-12-03 |
| 10343252 | Polishing apparatus for detecting abnormality in polishing of a substrate | Masaya Seki, Hiroyuki Takenaka | 2019-07-09 |
| 10307882 | Method and apparatus for polishing a substrate | Makoto Fukushima, Shingo Togashi, Tomoshi Inoue | 2019-06-04 |
| 10293455 | Polishing apparatus | Osamu Nabeya, Makoto Fukushima, Hozumi Yasuda | 2019-05-21 |
| 10155294 | Polishing apparatus and polishing method | Masaya Seki, Kenya Ito | 2018-12-18 |
| 10040166 | Polishing apparatus | Osamu Nabeya, Makoto Fukushima, Hozumi Yasuda | 2018-08-07 |
| 9914196 | Polishing apparatus and polishing method | Masaya Seki, Kenya Ito | 2018-03-13 |
| 9808903 | Method of polishing back surface of substrate and substrate processing apparatus | Yu Ishii, Kenya Ito, Masayuki Nakanishi | 2017-11-07 |
| 9808836 | Substrate processing apparatus | Kenya Ito, Yu Ishii, Keisuke Uchiyama | 2017-11-07 |
| 9782869 | Apparatus for detecting abnormality in polishing of a substrate | Masaya Seki, Hiroyuki Takenaka | 2017-10-10 |
| 9724797 | Polishing apparatus | Osamu Nabeya, Makoto Fukushima, Hozumi Yasuda | 2017-08-08 |
| 9694467 | Polishing method of polishing a substrate | Masaya Seki | 2017-07-04 |
| 9630289 | Polishing method involving a polishing member polishing at angle tangent to the substrate rotational direction | Atsushi Yoshida, Michiyoshi YAMASHITA | 2017-04-25 |
| 9604335 | Wafer polishing apparatus | Atsushi Yoshida, Toshifumi Watanabe | 2017-03-28 |