Issued Patents All Time
Showing 25 most recent of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12358096 | Rubber membrane having first and second hardness for use in a polishing head | Osamu Nabeya | 2025-07-15 |
| 12183642 | Film-thickness measuring method, method of detecting notch portion, and polishing apparatus | Osamu Nabeya, Keisuke Namiki | 2024-12-31 |
| 12128523 | Polishing apparatus | Makoto Fukushima, Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Satoru Yamaki | 2024-10-29 |
| 12068189 | Elastic membrane, substrate holding device, and polishing apparatus | Satoru Yamaki, Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Tomoko Owada +1 more | 2024-08-20 |
| 11958163 | Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane | Osamu Nabeya, Makoto Fukushima, Keisuke Namiki, Satoru Yamaki, Masahiko Kishimoto +1 more | 2024-04-16 |
| D1021832 | Elastic membrane | Kenichi Akazawa, Osamu Nabeya, Satoru Yamaki, Tomoko Owada, Cheng Cheng +1 more | 2024-04-09 |
| 11745306 | Polishing apparatus and method of controlling inclination of stationary ring | Tomoko Owada, Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Satoru Yamaki +1 more | 2023-09-05 |
| 11731235 | Polishing apparatus and polishing method | Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Satoru Yamaki, Tomoko Owada +1 more | 2023-08-22 |
| D989012 | Elastic membrane | Kenichi Akazawa, Osamu Nabeya, Satoru Yamaki, Tomoko Owada, Cheng Cheng +1 more | 2023-06-13 |
| 11654524 | Method of detecting abnormality of a roller which transmits a local load to a retainer ring, and polishing apparatus | Tomoko Owada, Osamu Nabeya, Yuta Suzuki | 2023-05-23 |
| 11548113 | Method and apparatus for polishing a substrate | Makoto Fukushima, Tetsuji Togawa, Tomoshi Inoue | 2023-01-10 |
| 11478895 | Substrate holding device, substrate polishing apparatus, and method of manufacturing the substrate holding device | Hozumi Yasuda, Makoto Fukushima, Osamu Nabeya | 2022-10-25 |
| 11472001 | Elastic membrane and substrate holding apparatus | Cheng Cheng, Makoto Fukushima, Kazuto Hirokawa | 2022-10-18 |
| 11179823 | Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane | Osamu Nabeya, Makoto Fukushima, Keisuke Namiki, Satoru Yamaki, Masahiko Kishimoto +1 more | 2021-11-23 |
| 11088011 | Elastic membrane, substrate holding device, and polishing apparatus | Satoru Yamaki, Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Tomoko Owada +1 more | 2021-08-10 |
| D918161 | Elastic membrane | Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Satoru Yamaki, Tomoko Owada +1 more | 2021-05-04 |
| D913977 | Elastic membrane for semiconductor wafer polishing | Satoru Yamaki, Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Tomoko Owada +1 more | 2021-03-23 |
| 10702972 | Polishing apparatus | Makoto Fukushima, Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Satoru Yamaki | 2020-07-07 |
| 10486284 | Substrate holding device, and substrate polishing apparatus | Hozumi Yasuda, Makoto Fukushima, Osamu Nabeya | 2019-11-26 |
| 10464185 | Substrate polishing method, top ring, and substrate polishing apparatus | Shintaro ISONO, Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Makoto Fukushima +1 more | 2019-11-05 |
| 10414015 | Polishing apparatus and polishing method | Makoto Fukushima, Hozumi Yasuda | 2019-09-17 |
| D859332 | Elastic membrane for semiconductor wafer polishing | Satoru Yamaki, Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Tomoko Owada | 2019-09-10 |
| 10391603 | Polishing apparatus, control method and recording medium | Satoru Yamaki, Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Makoto Fukushima +1 more | 2019-08-27 |
| 10307882 | Method and apparatus for polishing a substrate | Makoto Fukushima, Tetsuji Togawa, Tomoshi Inoue | 2019-06-04 |
| 10213896 | Elastic membrane, substrate holding apparatus, and polishing apparatus | Makoto Fukushima, Hozumi Yasuda, Keisuke Namiki, Osamu Nabeya, Satoru Yamaki +1 more | 2019-02-26 |