Issued Patents All Time
Showing 25 most recent of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381089 | Information processing system, information processing method, program, and substrate processing apparatus | Makoto Fukushima, Osamu Nabeya | 2025-08-05 |
| 12183642 | Film-thickness measuring method, method of detecting notch portion, and polishing apparatus | Osamu Nabeya, Shingo Togashi | 2024-12-31 |
| 12128523 | Polishing apparatus | Makoto Fukushima, Hozumi Yasuda, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2024-10-29 |
| 12068189 | Elastic membrane, substrate holding device, and polishing apparatus | Satoru Yamaki, Makoto Fukushima, Osamu Nabeya, Shingo Togashi, Tomoko Owada +1 more | 2024-08-20 |
| 11969858 | Substrate processing apparatus | Makoto Fukushima | 2024-04-30 |
| 11958163 | Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane | Osamu Nabeya, Makoto Fukushima, Shingo Togashi, Satoru Yamaki, Masahiko Kishimoto +1 more | 2024-04-16 |
| 11745306 | Polishing apparatus and method of controlling inclination of stationary ring | Tomoko Owada, Makoto Fukushima, Osamu Nabeya, Shingo Togashi, Satoru Yamaki +1 more | 2023-09-05 |
| 11731235 | Polishing apparatus and polishing method | Shingo Togashi, Makoto Fukushima, Osamu Nabeya, Satoru Yamaki, Tomoko Owada +1 more | 2023-08-22 |
| 11179823 | Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane | Osamu Nabeya, Makoto Fukushima, Shingo Togashi, Satoru Yamaki, Masahiko Kishimoto +1 more | 2021-11-23 |
| 11088011 | Elastic membrane, substrate holding device, and polishing apparatus | Satoru Yamaki, Makoto Fukushima, Osamu Nabeya, Shingo Togashi, Tomoko Owada +1 more | 2021-08-10 |
| D918161 | Elastic membrane | Shingo Togashi, Makoto Fukushima, Osamu Nabeya, Satoru Yamaki, Tomoko Owada +1 more | 2021-05-04 |
| D913977 | Elastic membrane for semiconductor wafer polishing | Satoru Yamaki, Makoto Fukushima, Osamu Nabeya, Shingo Togashi, Tomoko Owada +1 more | 2021-03-23 |
| 10702972 | Polishing apparatus | Makoto Fukushima, Hozumi Yasuda, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2020-07-07 |
| 10464185 | Substrate polishing method, top ring, and substrate polishing apparatus | Shintaro ISONO, Hozumi Yasuda, Osamu Nabeya, Makoto Fukushima, Shingo Togashi +1 more | 2019-11-05 |
| 10442056 | Substrate holding apparatus and polishing apparatus | Hozumi Yasuda, Osamu Nabeya, Makoto Fukushima | 2019-10-15 |
| D859332 | Elastic membrane for semiconductor wafer polishing | Satoru Yamaki, Makoto Fukushima, Osamu Nabeya, Shingo Togashi, Tomoko Owada | 2019-09-10 |
| 10391603 | Polishing apparatus, control method and recording medium | Satoru Yamaki, Hozumi Yasuda, Osamu Nabeya, Makoto Fukushima, Shingo Togashi +1 more | 2019-08-27 |
| 10213896 | Elastic membrane, substrate holding apparatus, and polishing apparatus | Makoto Fukushima, Hozumi Yasuda, Osamu Nabeya, Shingo Togashi, Satoru Yamaki +1 more | 2019-02-26 |
| D839224 | Elastic membrane for semiconductor wafer polishing | Satoru Yamaki, Makoto Fukushima, Osamu Nabeya, Shingo Togashi, Tomoko Owada +1 more | 2019-01-29 |
| 9999956 | Polishing device and polishing method | Hozumi Yasuda, Osamu Nabeya, Makoto Fukushima, Shingo Togashi, Satoru Yamaki +1 more | 2018-06-19 |
| D813180 | Elastic membrane for semiconductor wafer polishing apparatus | Makoto Fukushima, Hozumi Yasuda, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2018-03-20 |
| D808349 | Elastic membrane for semiconductor wafer polishing apparatus | Makoto Fukushima, Hozumi Yasuda, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2018-01-23 |
| 9815171 | Substrate holder, polishing apparatus, polishing method, and retaining ring | Satoru Yamaki, Hozumi Yasuda, Osamu Nabeya, Makoto Fukushima, Shingo Togashi | 2017-11-14 |
| D799437 | Substrate retaining ring | Osamu Nabeya, Hozumi Yasuda, Makoto Fukushima, Shingo Togashi, Satoru Yamaki | 2017-10-10 |
| D794585 | Retainer ring for substrate | Osamu Nabeya, Hozumi Yasuda, Makoto Fukushima, Shingo Togashi, Satoru Yamaki | 2017-08-15 |