Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11958163 | Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane | Osamu Nabeya, Makoto Fukushima, Keisuke Namiki, Shingo Togashi, Satoru Yamaki +1 more | 2024-04-16 |
| 11179823 | Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane | Osamu Nabeya, Makoto Fukushima, Keisuke Namiki, Shingo Togashi, Satoru Yamaki +1 more | 2021-11-23 |
| D913977 | Elastic membrane for semiconductor wafer polishing | Satoru Yamaki, Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi +1 more | 2021-03-23 |
| D839224 | Elastic membrane for semiconductor wafer polishing | Satoru Yamaki, Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi +1 more | 2019-01-29 |
| 9550271 | Substrate holding apparatus and polishing apparatus | Hozumi Yasuda, Makoto Fukushima, Osamu Nabeya | 2017-01-24 |