Issued Patents All Time
Showing 25 most recent of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12211733 | Substrate processing apparatus and substrate processing method | Nobuyuki Takada | 2025-01-28 |
| 12128523 | Polishing apparatus | Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2024-10-29 |
| 12036634 | Substrate processing control system, substrate processing control method, and program | Koichi Takeda, Tsuneo Torikoshi, Kunio Oishi, Katsuhide Watanabe, Yu Ishii | 2024-07-16 |
| 12017323 | Polishing head system and polishing apparatus | Itsuki Kobata, Akio Yanai, Nobuyuki Takahashi, Takamasa Nakamura, Keisuke Sakata +4 more | 2024-06-25 |
| 11911872 | Substrate processing apparatus and substrate processing method | Nobuyuki Takada | 2024-02-27 |
| 11735457 | Substrate processing apparatus and substrate processing method | Nobuyuki Takada | 2023-08-22 |
| 11511389 | Polishing head and polishing apparatus | Kenichi Akazawa, Makoto Kashiwagi, Yu Ishii, Atsushi Yoshida, Kenichi Kobayashi +1 more | 2022-11-29 |
| 11478895 | Substrate holding device, substrate polishing apparatus, and method of manufacturing the substrate holding device | Shingo Togashi, Makoto Fukushima, Osamu Nabeya | 2022-10-25 |
| 11465254 | Polishing machine and a polishing method for a substrate | Itsuki Kobata, Katsuhide Watanabe, Yuji Yagi, Nobuyuki Takahashi, Koichi Takeda | 2022-10-11 |
| 11224956 | Polishing apparatus | Osamu Nabeya, Tetsuji Togawa, Makoto Fukushima | 2022-01-18 |
| 10702972 | Polishing apparatus | Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2020-07-07 |
| 10486284 | Substrate holding device, and substrate polishing apparatus | Shingo Togashi, Makoto Fukushima, Osamu Nabeya | 2019-11-26 |
| 10464185 | Substrate polishing method, top ring, and substrate polishing apparatus | Shintaro ISONO, Keisuke Namiki, Osamu Nabeya, Makoto Fukushima, Shingo Togashi +1 more | 2019-11-05 |
| 10442056 | Substrate holding apparatus and polishing apparatus | Keisuke Namiki, Osamu Nabeya, Makoto Fukushima | 2019-10-15 |
| 10414015 | Polishing apparatus and polishing method | Makoto Fukushima, Shingo Togashi | 2019-09-17 |
| 10391603 | Polishing apparatus, control method and recording medium | Satoru Yamaki, Keisuke Namiki, Osamu Nabeya, Makoto Fukushima, Shingo Togashi +1 more | 2019-08-27 |
| 10293455 | Polishing apparatus | Osamu Nabeya, Tetsuji Togawa, Makoto Fukushima | 2019-05-21 |
| 10213896 | Elastic membrane, substrate holding apparatus, and polishing apparatus | Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki +1 more | 2019-02-26 |
| 10092992 | Polishing apparatus, polishing head, and retainer ring | Makoto Fukushima, Osamu Nabeya | 2018-10-09 |
| 10040166 | Polishing apparatus | Osamu Nabeya, Tetsuji Togawa, Makoto Fukushima | 2018-08-07 |
| 9999956 | Polishing device and polishing method | Keisuke Namiki, Osamu Nabeya, Makoto Fukushima, Shingo Togashi, Satoru Yamaki +1 more | 2018-06-19 |
| D813180 | Elastic membrane for semiconductor wafer polishing apparatus | Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2018-03-20 |
| 9884401 | Elastic membrane and substrate holding apparatus | Makoto Fukushima, Osamu Nabeya, Shingo Togashi | 2018-02-06 |
| D808349 | Elastic membrane for semiconductor wafer polishing apparatus | Makoto Fukushima, Keisuke Namiki, Osamu Nabeya, Shingo Togashi, Satoru Yamaki | 2018-01-23 |
| 9815171 | Substrate holder, polishing apparatus, polishing method, and retaining ring | Satoru Yamaki, Keisuke Namiki, Osamu Nabeya, Makoto Fukushima, Shingo Togashi | 2017-11-14 |